Discussion Category: All Categories
ITQ 100 ion gauage problem
while instrument was running ok. suddenly vacuum fault appear and iongauage was off. when sample is run message appear bad vacuum RF will not turn on. but fore pressur is ok
Discussion Category: All Categories
while instrument was running ok. suddenly vacuum fault appear and iongauage was off. when sample is run message appear bad vacuum RF will not turn on. but fore pressur is ok