Discussion Category: Electron Microscopes
JSM-6510LV
Our SEM faced some problem. We cannot evacuate the system using High Voltage Pressure. The error said "Evacuation Failure: Please Check O-Rings of the Gun, Stage, etc"
Reply bybeamsys
What was done to the tool just before problem appeared? Was there any service or opening? Usually vacuum problems happen in the area that was touched for some other reason. If there was no service or work on the tool done just before problem appeared, then check O-rings, check vacuum sensors, check pumps, get (or rent) leak detector, find someone who knows how to service vacuum systems, and start troubleshooting :)
Valery Ray
www.linkedin.com/in/valeryray
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