ZEISS - AURIGA®
Information Beyond Resolution
AURIGA® the new CrossBeam® Workstation (FIB-SEM) from Carl Zeiss SMT exactly delivers all this – on a nanoscopic scale. Using the best-in-class FIB column and the proprietary GEMINI e-Beam column from Carl Zeiss, together with a completely new designed vacuum chamber for advanced analytics, AURIGA® assists you in obtaining the maximum information possible out of your sample.
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Features of AURIGA®
Unique Imaging
Imaging of non-conductive specimens using all standard detectors with local charge compensation
Simultaneous detection of topographical and compositional information with a unique detector scheme including EsB-technology
Investigation of magnetic samples with GEMINI® objective lens design
Advanced Analytics
Analysis of non-conducting materials with local charge compensation
Multi-purpose chamber with 15 accessory ports
Optimum chamber geometry for the simultaneous integration of EDS, EBSD, STEM, WDS, SIMS etc.
Precise Processing
Innovative FIB technology with best-in-class resolution (< 2.5 nm)
High resolution live FE-SEM monitoring of the entire preparation process
Advanced gas processing technology for ion and e-beam assisted etching and deposition
Future Assured
Expandable platform concept based on GEMINI® FE-SEM technology
Modular building blocks for value-adding functionality
General Specifications
Electron Microscope Type | SEM-FIB |
Microscope Type | Electron |
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Zeiss AURIGA®