Hitachi - Ion Milling System ArBlade 5000
The most advanced broad ion beam system for producing exceptionally high-quality cross-section or flat-milling samples...
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Features of Ion Milling System ArBlade 5000
Cross-section milling rate: 1 mm/hour!*1 The ArBlade 5000 is equipped with a fast-milling Ar ion gun with a milling rate twice as high for cutting-edge performance, thus dramatically reducing the processing time for cross-section preparation.
*1Si protrudes 100 um from the mask edge.
Comparison of cross-section milling (Specimen: lead for mechanical pencil, Milling time : 1.5 hours)
Cross-section widths up to 8 mm! For large-area milling requirements such as electronic-device applications, a revolutionary cross-section milling holder design has been developed for wider-area fabrication.
Example of wide-area cross-section milling (Specimen: electronic component, Milling time: 5 hours)
Hybrid Model: Dual-Milling Configuration Available The all new ion-milling system is equipped with both cross-section milling and flat milling modes for the most complex application needs. Equipped with multiple holders, the ArBlade 5000 system accommodates a wide range of applications.
Cross-section Milling Used to produce wider, undistorted cross sections without applying mechanical stress to the sample
Flat Milling Used for removing surface layer artifacts and final polish after traditional mechanical polishing techniques.
General Specifications
Accelerating voltage | 0 to 8 kV |
Electron Microscope Type | FIB |
Microscope Type | Electron |