Hitachi - Scanning Probe Microscope AFM5500M

Manufactured by  Hitachi
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The AFM5500M is a SPM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It...

The AFM5500M is a SPM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation, and accuracy, as well as correlation for AFM/SEM investigations.
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Features of Scanning Probe Microscope AFM5500M

Ease of Use 

Significantly simplifying the AFM operation 

  • Wide-open tip and sample access * Fully addressable 4-inch stage eliminating the need for sample remount/rotation * Point-and-click function enabling easy and quick camera-based sample navigation * All built-in accessories allowing seamless and software-controlled mode switching 

    Automation 

    Easier, faster, and more precise AFM imaging * Automated cantilever exchange * Automated laser alignment * Automated image optimization (RealTune® II) * Automated AFM measurements following a recipe 

    Accuracy 

    Enhanced accuracy of AFM measurements * Flexure-based design providing superior flat and orthogonal scan * Closed-loop scanner allowing highly linear and accurate imaging * Low sensor noise yielding high-resolution and high-quality results * Tip evaluation capability ensuring probe quality and artifact-free images 

    Flat Scan  Conventional AFM with a piezoelectric tube scanner requires data flattening or leveling because of its intrinsic curved motion. However, this flattening may distort a sample' s micro-surface structure, including its Z value. The newly developed AFM5500M is equipped with a flexure-based scanner that enables well-controlled raster scans along X and Y directions only. As a result, this advanced scanner design can effectively eliminate background curvatures in a wide scan area and improve the accuracy of AFM measurements. 

    High Orthogonality  Using a conventional piezoelectric tube scanner can cause cross-talk when bending the tube scanner.  This cross-talk leads to distortions and asymmetrization. The improved AFM5500M’s scanner reduces cross-talk making both accurate and symmetric measurements possible. 

    • AFM5100N (with an open-loop scanner) 

    Correlation 

    Correlative AFM and SEM Imaging  The Hitachi-proprietary SEM/AFM shared alignment holder provides quick and easy measurements and analysis of topography, structures, composition, and surface property. 

    AFM and SEM Measurements of the Same Area (Sample:Graphene/SiO2)  Overlay images of SEM, AFM (topography), and KFM (surface potential)   * It can be concluded from AFM cross-session height measurements that those contrast differences in the SEM image are corresponding to the variation of graphene layers in the AFM image. * It indicates that surface potential (work function) of graphene sheets is highly dependent on the sample thickness, i.e., the number of graphene layers. * High-precision 3D topographic data in conjunction with the electrical property examination provide strong evidence for identifying the root cause of captured variations in SEM contrasts. 

    Hitachi High-Tech Science will continue to develop AFM-correlated systems with other types of microscopes and inspection equipment.

General Specifications
Microscope TypeAtomic Force

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