ULVAC - QULEE YTP

Manufactured by  ULVAC
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Differentially Pumped Quadropole Mass Spectrometer

A variation of Qulee, adding new features in response to customer needs. By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for process management and residual gas analysis.
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Features of QULEE YTP

Features

  • Provides gas analysis with an optional differential pumping unit
  • Utilizes standard vacuum unit model YTP-50M
  • Provides visual data without need for a PC
  • One-click function for easy operation, no complex procedures
  • Selectable maximum measurable pressures 500Pa, 100Pa, 10Pa, and 1Pa
  • (3.75Torr, 0.75Torr, 7.5 x 10-2Torr, and 7.5 x 10-3Torr / 5mbar, 1mbar, 0.1mbar, and 1.0 x 10-2)
  • Select from the mass numbers 1 to 100 (BGM-101/102), 1 to 200 (BGM-201/202), 1 to 300 (HGM-302)
  • Complete Leak Test Function (Helium leak test, air leak test, leak up test)
  • Software included (Windows XP/7)

Applications

  • Various types of gas analysis for research and development
  • Gas monitoring of PVD system during processing
  • Residual gas analysis in PVD system
  • Residual gas analysis for high vacuum pumping equipment, etc.
  • Atmospheric pressure (10+5Pa, 760Torr, 1013mbar) of gas analysis (Atmospheric pressure type)
General Specifications

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