ULVAC - G-TRAN SERIES SP1

Manufactured by  ULVAC
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Standard Pirani Gauge

The G-Tran Series contains two pirani gauge measuring units: a sensor unit (SP1). The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).
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Features of G-TRAN SERIES SP1

Features   

  • If you don't need a pressure display device:   * Lower the costs associated with a vacuum gauge   * Save space by minimizing the control panel   * Replacing sensor heads is greatly simplified.   * Corrosion-resistant platinum is used for the filament material   * You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)   * 2 Output set points   * SP1: Pressure reading is a 0 to 5V output (non-linear)   * Operates with 24VDC power input   

    Applications   * Process Control In   * Low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.   * Low vacuum range for industrial equipment such as vacuum furnaces, etc.   * Low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

General Specifications

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