ULVAC - G-TRAN SERIES SP1
Standard Pirani Gauge
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Features of G-TRAN SERIES SP1
Features
If you don't need a pressure display device: * Lower the costs associated with a vacuum gauge * Save space by minimizing the control panel * Replacing sensor heads is greatly simplified. * Corrosion-resistant platinum is used for the filament material * You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16) * 2 Output set points * SP1: Pressure reading is a 0 to 5V output (non-linear) * Operates with 24VDC power input
Applications * Process Control In * Low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing. * Low vacuum range for industrial equipment such as vacuum furnaces, etc. * Low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.
General Specifications
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