ULVAC - GI-SERIES
Integrated Display Ionization Gauge
Metal gauge, GI-M2:, 6.7 x 10-1 to 10-6 Pa (5 x 10-3 to 9.75 x10-9 Torr, 6.7 x 10-3 to 1.3 x 10-8 mbar)
Glass gauge, GI-D7: range using triode tube or B-A type sensor heads.
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Features of GI-SERIES
Features
Can measure a wide pressure range from 9.9 to 5×10-8Pa (GI-M2) (7.4 x 10-2 to 3.75 x10-10 Torr, 9.9 x 10-2 to 5 x 10-10 mbar) * 2 types vacuum tube, metal and glass: Sensor head selected depending on the application (bare type also available) * Small-sized metallic sensor head prevents it from breaking (GI-M2) * Sensitivity setup can be changed for different gases. Allowing even more accurate pressure measurement. * Ideal for fixing the measurement range * 2 set points output * Switch 1/2 filament, sensitivity setting, range hold function, Degas
Function * RS232C communication * BCD output * Pressure is 0 to 10V Log output (psudo-log output)
Applications * GI-M2 * Sputtering system * Vacuum evaporation system (Turbo-molecular pump type) * Pressure measurement for other general ultra-high vacuum pumping system * GI-D7 * Vacuum heat treatment furnace * Vacuum brazing furnace * Vacuum evaporation system(diffusion pump type) * Process control for furnaces and other industrial equipment
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