ULVAC - G-TRAN SERIES SC1
No-Filament, No Problem
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Features of G-TRAN SERIES SC1
Features
Gauge cost is reduced because the display has been eliminated * Smaller size frees-up control panel space * Wiring is reduced * Simplified Maintenance * Filament is eliminated - No damage from exposure to atmospheric pressure * Control output signal - 2 setpoint output * Output signal - Pressure reading is a 0 to 10V Log output (non-linear output) * Power supply voltage - Operated by DC24V
Applications * Process Control In * Precision vacuum equipment used for semiconductor, optics and electronic parts manufacturing * Low vacuum for industrial equipment * Vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment
General Specifications
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