ULVAC - VHC SERIES
Variable Atmosphere Rapid Heating/Cooling System
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Features of VHC SERIES
Applications
Solar cell substrate heat treatment * Heat treatment in a hydrogen atmosphere * Atmospheric annealing for basic research/heat treatment simulator for various materials * Gas quenching heat treatment * Thermal cycle and thermal shock testing * Investigating semiconductor baking, annealing conditions * 2-inch wafer research annealing * Heat treatment of ceramics in an oxygen controlled atmosphere
Features * Wide condition settings from high speed heating to low speed heating * Multi-step cyclic heating * High speed gas quenching and cooling control with the gas cooling mechanism * Easy data management with a PC
General Specifications
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