ULVAC - VHC SERIES

Manufactured by  ULVAC
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Variable Atmosphere Rapid Heating/Cooling System

Table top RTA systems useful for process development in the fields of solar cell, compound semiconductor, and general laboratory heat treating work. Combining an Infrared Gold Image Furnace and temperature controller. The VHC series adds a vacuum pumping system and Pirani gauge to the features of the QHC series and data can be easily managed. Both VHC and QHC systems are customizable to your needs.
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Features of VHC SERIES

Applications 

  • Solar cell substrate heat treatment * Heat treatment in a hydrogen atmosphere * Atmospheric annealing for basic research/heat treatment simulator for various materials * Gas quenching heat treatment * Thermal cycle and thermal shock testing * Investigating semiconductor baking, annealing conditions * 2-inch wafer research annealing * Heat treatment of ceramics in an oxygen controlled atmosphere 

    Features * Wide condition settings from high speed heating to low speed heating * Multi-step cyclic heating * High speed gas quenching and cooling control with the gas cooling mechanism * Easy data management with a PC

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