ULVAC - DIS SERIES
Manufactured by ULVAC
Versatile Small Scroll Pump
The DIS series is a family of versatile double wrapping scroll pumps which feature excellent pumping speed. Capable of reaching high vacuum and operating at atmospheric pressure with low vibration and noise, the DIS is a versatile dry pump that serves as the backbone of our dry-type HELIOT 901D2 and 904D3/D4 Models. These pumps show excellent performance for a wide array of dry-pumping applications
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Features of DIS SERIES
Applications:
- Analytical equipment * Gas recovery system * Coating equipment * Backing vacuum pump for TMP * Helium leak detector * Manufacturing process for semiconductor
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