ULVAC - Oxide Deposition
Manufactured by ULVAC
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This is a batch type high vacuum evaporation system for the deposition of metal and oxide on a substrate. Since the...
This is a batch type high vacuum evaporation system for the deposition of metal and oxide on a substrate. Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing. Batch type, high vacuum evaporation system.
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Features of Oxide Deposition
- Supports various evaporation sources (i.e. EB, RH, EB + RH etc.). * Substrate holders complying with each process (i.e. lift-off, planetary, satellite etc.). * Supports various substrates; substrates size from Φ2in to 6in, rectangular substrates, Si, compounds, glass and ceramics. * Display and operation on LCD touch panel. * Superior PC-operating system and functions (recipe function, data logging, maintenance assist function).
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