Busch Vacuum Pumps and Systems - Busch COBRA BC 0600 F

Follow this Equipment

Efficient:>cost-effective, long uptime, energy-efficient Easy servicing:
Efficient: 
cost-effective, long uptime, energy-efficient  
Easy servicing: 
long service intervals  
Reliable: 
operationally reliable  
Flexible: 
application-oriented  
Quiet: 
sound level < 62 dB(A) 
 
The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications. 
 
The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame. 
 
COBRA series vacuum pumps offer reduced cost-of-ownership. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.

Active Questions & AnswersAsk a Question

There are no current Discussions

Vacuum Pumps Service ProvidersView All (13)

Request Support
Documents & Manuals

There are no Documents or Manuals available.

Features

There are no Features available.

General Specifications

There are no General Specifications available.

Additional Specifications

Applications 
Load lock (conditional) 
Transfer 
Metrology 
Lithography 
Physical Vapor Deposition (PVD) 
Rapid Thermal Annealing (RTA) 
Strip/Ashing 
Oxide Etch 
Silicon Etch 
Metal Etch 
 
Technical specifications 
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities. 
 
The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket. 
 
The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint. 
 
The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Looking for New or Used Equipment?

Shop on LabX

Shop on Labx.com