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  4. HORIBA - Flex-CLUE

HORIBA - Flex-CLUE

Manufactured by  HORIBA
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Flex-CLUE is the ideal flexible package to handle highperformance CL analysis, for a wide range of applications, within an affordable budget.

Flex-CLUE is the ideal flexible package to handle highperformance CL analysis, for a wide range of applications, within an affordable budget. Based on a dedicated fiber-optic interface, Flex- CLUE offers a compact and remote CL solution perfectly adapted to an SEM environment where space or access is limited.
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Features of Flex-CLUE
  • Maintains original SEM functionality * High-efficiency CL signal-collection * Flexible spectral CL analysis
General Specifications

There are no General Specifications available.

Additional Specifications

Optics 

  • High efficiency optics designed to match fiber with spectrometer aperture 
     
    Collection interface 
  • 200 mm retraction mechanism 
  • Manual version 
  • Fine adjustment under vacuum 
  • Diamond–turned mirror 
  • Short working-distance mirror in option 
     
    Spectrometer 
  • Focal length from 140 to 320 mm 
  • Large choice of diffraction gratings 
  • Single or dual-port 
     
    Detection 
  • Panchromatic imaging 
  • Monochromatic imaging 
  • Spectral analysis 
  • Hyperspectral spectroscopy analysis 
  • Multiple detection options (up to 2) 
  • Large choice of detectors 
  • Single or multi-channel 
  • Thermoelectric or cryogenic cooling 
  • UV, visible or near-IR 
     
    Spectral coverage 
  • UV-Visible optical fiber 200-1000 nm 
  • Visible-near-IR optical fiber 400-1700 nm 
     
    CL ouputs 
  • Up to 1 
     
    Electron beam control 
    CLLINK Controller: 
  • Multiple acquisition processing 
    (Analog, pulse mode, SE) 
  • Mapping, line scan, point measurement 
  • Complete synchronization with detection 
  • Control by external scan input on SEM 
     
    Software 
  • LabSpec Spectroscopy and Imaging suite

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