Observation of surface properties using optical microscopes and SEMs is performed in a wide range of fields from advanced materials and semiconductor devices through to medicine and biology. However, in gaining a more accurate grasp of the true structure of a sample, analysis of its internal structure is becoming increasingly important. FIBs are therefore seeing wider application as an essential tool in cross-sectional SEM observation and TEM*3 analysis, as they are able to prepare cross sections at specified positions as well as ultra-thin lamellas. Meanwhile, there has also been significant interest recently in 3D structural analysis by FIB and SEM composite instruments. Automatic repetition of FIB cross section preparation and SEM observation provide a series of cross sectional images enabling 3D structural analysis of a specified microscopic section.