ZEISS - Crossbeam Family
Discovering and Designing Advanced Materials With Ease
Speed up your tomography runs: use up to 100 nA FIB current with excellent spot profile to bridge the gap between micro- and nanopatterning.
With Crossbeam you combine the imaging and analytical performance of the GEMINI column with the ability of a next-generation FIB for material processing and sample preparation on a nanoscopic scale. Use the modular platform concept and the open and easily extendable software architecture of this 3D nano-workstation for high throughput nanotomography and nanofabrication of even your most demanding, charging or magnetic samples.
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Features of Crossbeam Family
Maximize Your SEM Insights Take advantage of achieving up to 30% better SEM resolution at low voltage. Count on the SEM performance of your ZEISS Crossbeam for 2D surface sensitive images or when performing 3D tomography. Get excellent images from any sample thanks to the Gemini optics with a resolution down to 1.4 nm at 1 kV acceleration voltage by applying a voltage to the sample with Tandem decel. Characterize your sample comprehensively with a range of detectors. Get pure materials contrast with the unique Inlens EsB detector. Investigate non-conductive specimens undisturbed by charging artifacts.
Increase Your FIB Sample Throughput Profit from up to 40% faster material removal by the introduction of intelligent FIB milling strategies. Work with the highest ion beam current available in any gallium FIB-SEM. Save time with excellent FIB profiles using up to 100 nA current without compromising the ultimate FIB resolution. Profit from the speed and precision of intelligent FIB scanning strategies for material removal. Automatically prepare batches of samples, like cross-sections, TEM lamellae or any user defined pattern.
Experience Best 3D Resolution in Your FIB-SEM Analysis Enjoy the benefits of integrated 3D EDS analysis. Expand the capacity of your Crossbeam with ZEISS Atlas 5, the market-leading package for fast, precise tomography. Perform EDS analysis during tomography runs with the integrated 3D Analytics module of ZEISS Atlas 5. ZEISS Crossbeam combines Gemini optics with a FIB tailored for precision and speed. Profit from best 3D resolution and leading isotropic voxel size in FIB-SEM tomography. Probe less than 3 nm in depth and produce surface sensitive, material contrast images using the Inlens EsB detector.
General Specifications
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Series Modals
ZEISS - ZEISS Crossbeam 340
[+] View Model SpecificationsMicroscope Type | Electron |
Additional Model Specifications | SEM Gemini I VP optics Chamber Size and Ports standard with 18 ports Stage 100 mm travel range in x/y Charge Control Flood Gun Local Charge Compensation Variable Pressure Exemplified Options Inlens Duo for sequential SE/EsB* imaging VPSE detector Advantages Maximum sample variety due to variable pressure mode, wide range of in situ experiments, sequential Inlens SE / EsB* imaging possible. |
ZEISS - ZEISS Crossbeam 550
[+] View Model SpecificationsMicroscope Type | Electron |
Additional Model Specifications | SEM Gemini II optics Tandem decel option Chamber Size and Ports standard with 18 configurable ports or large with 22 configurable ports Stage standard with 100 mm or large 153 mm travel range in x/y Charge Control Flood Gun Local Charge Compensation Exemplified Options Inlens SE and Inlens EsB* for simultaneous imaging SE/EsB* imaging large airlock for 8 inch wafers configure three pneumatically driven accesories simultaneously on the large chamber, e.g. STEM, 4-Quadrant-Backscatter detetor, and local charge compensation Advantages High throughput in analytics and imaging, high resolution under all conditions, simultaneous Inlens SE and Inlens EsB* imaging. |
Videos
ZEISS Crossbeam 340 & 540: Product Trailer