Bruker AXS - Dimension™ X
Manufactured by Bruker AXS
No Documents
Automated Atomic Force Microscope Cuts Etch Measurement Turnaround Time
Dimension™ X automated atomic force microscope replaces costly, destructive cross-sectioning techniques, cutting etch measurement time from days to minutes, to help you increase yield without sacrificing quality.
The Dimension X is engineered to provide unequaled throughput of 25 WPH (five sites) and provides in-line repeatable metrology for the most difficult to measure etch features.
The Dimension X is engineered to provide unequaled throughput of 25 WPH (five sites) and provides in-line repeatable metrology for the most difficult to measure etch features.
Active Questions & AnswersAsk a Question
There are no current Discussions
Need Equipment Support?
Documents & Manuals
There are no Documents or Manuals available.
Features of Dimension™ X
- Delivers fast, highly repeatable characterization and control of STI etch
- Unique Deep Trench (DT) mode enables nondestructive in-line measurement of features as small as 45nm
- Proven 300mm automation platform adopted by fabs worldwide
- Performs nondestructive measurement directly on production wafers
- Supports NIST-traceable calibration and proven correlation to SEM techniques
General Specifications
There are no General Specifications available.