Bruker AXS - Dimension Edge PSS
Manufactured by Bruker AXS
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Patterned Sapphire Substrate Resolution For Now And The Future
Bruker's Dimension Edge™ PSS Atomic Force Microscope with AutoMET™ Metrology Analysis Software is the ideal nano-metrology and nano-inspection system for LED substrate and epitaxial manufacturers. As an extension of the Dimension Edge AFM platform, the Edge PSS (Patterned Sapphire Substrate) incorporates the incredible value and resolution for which the Dimension AFM systems are renowned, while also providing a specialized solution for substrate measurements. The system incorporates Bruker's proprietary AutoMET metrology analysis software, which has been designed specifically to meet the needs of patterned sapphire substrate suppliers, providing a level of automation and ease of use never before seen in a value-price atomic force microscope.
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Features of Dimension Edge PSS
- Sub-micron pitch resolution meets roadmap needs
- <0.2nm noise floor provides bare substrate and epi roughness measurements
- Sample flexibility accommodates 2- to 6-inch wafers
- Full analysis software measures every feature or statistical data automatically
- PSS analysis characterizes height, side-wall angle, profile, diameter, and pitch
- AutoMET metrology analysis software automates multi-wafer runs
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